Sapphire substrate sidewall shaping of deep ultraviolet...

Applied Physics Express 2017 / 06 Vol. 10; Iss. 6

Sapphire substrate sidewall shaping of deep ultraviolet light-emitting diodes by picosecond laser multiple scribing

Guo, Yanan, Zhang, Yun, Yan, Jianchang, Chen, Xiang, Zhang, Shuo, Xie, Haizhong, Liu, Peng, Zhu, Haifeng, Wang, Junxi, Li, Jinmin
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Volume:
10
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.10.062101
Date:
June, 2017
File:
PDF, 1.57 MB
english, 2017
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