Features of AlN film grown by ion-plasma sputtering

Lubyanskiy, Ya V, Bondarev, A D, Soshnikov, I P, Kotlyar, K P, Kirilenko, D A, Bert, N A, Ayusheva, K R, Tarasov, I S

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Volume:

741

Language:

english

Journal:

Journal of Physics: Conference Series

DOI:

10.1088/1742-6596/741/1/012041

Date:

August, 2016

File:

PDF, 871 KB

english, 2016

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