Ion flux and energy virtual sensor for measuring ion flux...

Journal of Physics Conference Series 2016 / 10 Vol. 768

Ion flux and energy virtual sensor for measuring ion flux and energy distribution at a RF biased electrode in ICP reactor (RIE-mode)

Bogdanova, M A, Lopaev, D V, Zyryanov, S M
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Volume:
768
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/768/1/012016
Date:
October, 2016
File:
PDF, 3.31 MB
english, 2016
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