![](/img/cover-not-exists.png)
Shearing interference microscope for step-height measurements
TRỊNH, HƯNG-XUÂN, LIN, SHYH-TSONG, CHEN, LIANG-CHIA, YEH, SHENG-LIH, CHEN, CHIN-SHENG, HOANG, HONG-HAIVolume:
266
Language:
english
Journal:
Journal of Microscopy
DOI:
10.1111/jmi.12527
Date:
May, 2017
File:
PDF, 828 KB
english, 2017