Experimental and DFT study of nitrogen atoms interactions...

The European Physical Journal D / Atomic, Molecular, Optical and Plasma Physics 2017 / 5 Vol. 71; Iss. 5

Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κfilms

Voronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Zotovich, Alexey I., Baklanov, Mikhail R.
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Volume:
71
Language:
english
Journal:
The European Physical Journal D
DOI:
10.1140/epjd/e2017-70618-8
Date:
May, 2017
File:
PDF, 774 KB
english, 2017
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