Pore Etching in Compound Semiconductors for the Production of Photonic Crystals
Foell, Helmut, Langa, Sergiu, Carstensen, Juergen, Christophersen, Marc, Tiginyanu, Ivan, Dichtel, KarinVolume:
722
Year:
2002
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-722-L6.4
File:
PDF, 3.37 MB
english, 2002