P-64: The Property Differences of Copper Thin Films Deposited by One-step and Multi-step DC Magnetron Sputtering Technique
Xia, Hui, Zhou, Zhichao, Hu, Xiaobo, Li, Jiayu, Tan, ZhiweiVolume:
48
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.11929
Date:
May, 2017
File:
PDF, 724 KB
english, 2017