P-64: The Property Differences of Copper Thin Films...

P-64: The Property Differences of Copper Thin Films Deposited by One-step and Multi-step DC Magnetron Sputtering Technique

Xia, Hui, Zhou, Zhichao, Hu, Xiaobo, Li, Jiayu, Tan, Zhiwei
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Volume:
48
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.11929
Date:
May, 2017
File:
PDF, 724 KB
english, 2017
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