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Study on the effect of hydrogen addition on the variation of plasma parameters of argon-oxygen magnetron glow discharge for synthesis of TiO 2 films
Saikia, Partha, Saikia, Bipul Kumar, Bhuyan, HemanVolume:
6
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4947091
Date:
April, 2016
File:
PDF, 912 KB
english, 2016