An XPS method for layer profiling of NbN thin films

EPJ Web of Conferences 2017 Vol. 132

An XPS method for layer profiling of NbN thin films

Lubenchenko, A.V., Batrakov, A.A., Pavolotsky, A.B., Krause, S., Shurkaeva, I.V., Lubenchenko, O.I., Ivanov, D.A., Vinogradov, E.A., Naumov, A.V., Gladush, M.G., Karimullin, K.R.
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Volume:
132
Year:
2017
Language:
english
Journal:
EPJ Web of Conferences
DOI:
10.1051/epjconf/201713203053
File:
PDF, 45 KB
english, 2017
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