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Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma
Park, Il-seo, Kim, Dong-Hwan, Kim, Kyung-Hyun, Chung, Chin-WookVolume:
24
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4982815
Date:
May, 2017
File:
PDF, 2.26 MB
english, 2017