Temporal evolution of two-dimensional electron temperature...

Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma

Park, Il-seo, Kim, Dong-Hwan, Kim, Kyung-Hyun, Chung, Chin-Wook
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4982815
Date:
May, 2017
File:
PDF, 2.26 MB
english, 2017
Conversion to is in progress
Conversion to is failed