Fabrication and Electromechanical Modeling of a Flexural-Mode MEMS Piezoelectric Transformer in AlN
Camarda, Antonio, Sordo, Guido, Iannacci, Jacopo, Schneider, Michael, Schmid, Ulrich, Tartagni, Marco, Romani, AldoYear:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2709407
File:
PDF, 3.08 MB
english, 2017