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3-Dimensional Microstructure Fabrication using Multiple Moving Mask Deep X-ray Lithography Process
Tabata, Osamu, Terasoma, Kouichi, Agawa, Norihiro, Yamamoto, KoujiVolume:
120
Year:
2000
Language:
english
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.120.321
File:
PDF, 4.09 MB
english, 2000