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Coating synthesis on dielectric substrates assisted by pulsed beams of high-energy gas atoms
Grigoriev, S N, Melnik, Yu A, Metel, A SVolume:
830
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/830/1/012098
Date:
May, 2017
File:
PDF, 711 KB
english, 2017