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[IEEE 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Singapore (2016.7.18-2016.7.21)] 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Sample preparation technique for the revelation of a semiconductor dopant using an FE-SEM
Sunaoshi, Takeshi, Takeuchi, Shuichi, Kamino, Atsushi, Sasajima, Masahiro, Ito, HiroyukiYear:
2016
DOI:
10.1109/ipfa.2016.7564268
File:
PDF, 497 KB
2016