SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Industrial femtosecond lasers for machining of heat-sensitive polymers (Conference Presentation)
Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Hendricks, Frank, Bernard, Benjamin, Matylitsky, Victor V.Volume:
10091
Year:
2017
Language:
english
DOI:
10.1117/12.2251854
File:
PDF, 117 KB
english, 2017