Low Density of Near-Interface Traps at the Al2O3/4H-SiC...

Materials Science Forum 2017 / 5 Vol. 897

Low Density of Near-Interface Traps at the Al2O3/4H-SiC Interface with Al2O3 Made by Low Temperature Oxidation of Al

Khosa, Rabia Y., Sveinbjörnsson, Einar Ö., Winters, Michael, ul Hassan, Jawad, Karhu, Robin, Janzén, Erik, Rorsman, Niklas
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Volume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.897.135
Date:
May, 2017
File:
PDF, 820 KB
english, 2017
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