Single device on-chip feedthrough cancellation for enhanced...

Sensors and Actuators A: Physical 2017 / 06 Vol. 260

Single device on-chip feedthrough cancellation for enhanced electrical characterization of piezoelectric-on-silicon resonators in liquid

Ali, A., Lee, J.E.-Y.
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Volume:
260
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.04.032
Date:
June, 2017
File:
PDF, 2.25 MB
english, 2017
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