Measurement of −, and − and - densities in 60 and 100 MHz...

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Journal of Physics D Applied Physics 2017 / 06

Measurement of −, and − and - densities in 60 and 100 MHz asymmetric capacitively coupled plasma discharge produced in // gas mixture

Sirse, Nishant, Tsutsumi, Takayoshi, Sekine, Makoto, Hori, Masaru, Ellingboe, Albert
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Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aa77c4
Date:
June, 2017
File:
PDF, 991 KB
english, 2017
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