[IEEE 2017 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2017.4.2-2017.4.6)] 2017 IEEE International Reliability Physics Symposium (IRPS) - Impact of discrete trapping in high pressure deuterium annealed and doped poly-Si channel 3D NAND macaroni
Subirats, A., Arreghini, A., Breuil, L., Degraeve, R., Van den bosch, G., Linten, D., Furnemont, A.Year:
2017
Language:
english
DOI:
10.1109/IRPS.2017.7936319
File:
PDF, 407 KB
english, 2017