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SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 8 May 2017)] Smart Sensors, Actuators, and MEMS VIII - Topologically optimised flexure hinge based XY stage
Fonseca, Luis, Prunnila, Mika, Peiner, Erwin, Orta, Adil Han, Samur, Evren, Yilmaz, CetinVolume:
10246
Year:
2017
Language:
english
DOI:
10.1117/12.2267398
File:
PDF, 2.78 MB
english, 2017