Fabrication and evaluation of capacitive silicon resonators with piezoresistive heat engines
Van Toan, Nguyen, Van Nha, Nguyen, Song, Yunheub, Ono, TakahitoVolume:
262
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.05.031
Date:
August, 2017
File:
PDF, 3.55 MB
english, 2017