Fabrication and evaluation of capacitive silicon resonators...

Fabrication and evaluation of capacitive silicon resonators with piezoresistive heat engines

Van Toan, Nguyen, Van Nha, Nguyen, Song, Yunheub, Ono, Takahito
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Volume:
262
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.05.031
Date:
August, 2017
File:
PDF, 3.55 MB
english, 2017
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