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Investigation of working pressure on the surface roughness controlling technology of glow discharge polymer films based on the diagnosed plasma
ZHANG, Ling, CHEN, Guo, HE, Zhibing, AI, Xing, HUANG, Jinglin, LIU, Lei, TANG, Yongjian, HE, XiaoshanVolume:
19
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/aa6618
Date:
July, 2017
File:
PDF, 1.81 MB
english, 2017