Image-based pupil plane characterization via a space-domain...

Journal of Micro/Nanolithography MEMS and MOEMS 2017 / 06 Vol. 16; Iss. 2

Image-based pupil plane characterization via a space-domain basis

Levinson, Zac, Burbine, Andrew, Verduijn, Erik, Wood, Obert, Goldberg, Kenneth A., Benk, Markus P., Wojdyla, Antoine, Smith, Bruce W.
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Volume:
16
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.16.2.023509
Date:
June, 2017
File:
PDF, 3.52 MB
english, 2017
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