Si(100) Surface Cleaning Using Sr and SrO

MRS Proceedings 2002 Vol. 716

Si(100) Surface Cleaning Using Sr and SrO

Wei, Yi, Hu, Xiaoming, Liang, Yong, Jordan, D.C., Craigo, Brad, Droopad, Ravi, Yu, Z., Demkov, Alex, Edwards, John L., Moore, Karen, Ooms, William J.
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Volume:
716
Year:
2002
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-716-B3.4
File:
PDF, 405 KB
english, 2002
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