42-4L: Late-News Paper :...

42-4L: Late-News Paper : Chemical Stability Improvement in IGZO Using Selective Laser Annealing System

Goto, Tetsuya, Saito, Kaori, Imaizumi, Fuminobu, Mizumura, Michinobu, Suwa, Akira, Ikenoue, Hiroshi, Sugawa, Shigetoshi
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Volume:
48
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.11711
Date:
May, 2017
File:
PDF, 602 KB
2017
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