New Ultra-High Resolution SEM for Imaging by Low Energy...

New Ultra-High Resolution SEM for Imaging by Low Energy Electrons

Jiruse, J., Havelka, M., Polster, J., Lopour, F.
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Volume:
19
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927613008507
Date:
August, 2013
File:
PDF, 1.28 MB
2013
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