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AIP Conference Proceedings [AIP The eleventh international conference on fourier transform spectroscopy - Athens, Georgia (USA) (10-15 Aug 1997)] - FTIR monitoring of industrial scale CVD processes
Hopfe, V., Mosebach, H., Meyer, M., Sheel, D., Grählert, W., Throl, O., Dresler, B.Year:
1998
Language:
english
DOI:
10.1063/1.55843
File:
PDF, 1.08 MB
english, 1998