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[IEEE 2016 ELEKTRO - Strbske Pleso, High Tatras, Slovakia (2016.5.16-2016.5.18)] 2016 ELEKTRO - PhC and PQC patterned by interference lithography in photoresist surface
Goraus, Matej, Pudis, DusanYear:
2016
Language:
english
DOI:
10.1109/elektro.2016.7512151
File:
PDF, 1.02 MB
english, 2016