Process development for the reproducible roughness measurement of optical surfaces using white light interferometry
Liebl, Johannes, Biskup, Heiko, Draxinger, Sebastian, Rascher, Rolf, Wünsche, ChristineVolume:
5
Year:
2014
Language:
english
Journal:
International Journal of Metrology and Quality Engineering
DOI:
10.1051/ijmqe/2014004
File:
PDF, 3.60 MB
english, 2014