Process development for the reproducible roughness...

Process development for the reproducible roughness measurement of optical surfaces using white light interferometry

Liebl, Johannes, Biskup, Heiko, Draxinger, Sebastian, Rascher, Rolf, Wünsche, Christine
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Volume:
5
Year:
2014
Language:
english
Journal:
International Journal of Metrology and Quality Engineering
DOI:
10.1051/ijmqe/2014004
File:
PDF, 3.60 MB
english, 2014
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