Rapid and high throughput fabrication of high temperature stable structures through PDMS transfer printing
Hohenberger, Erik, Freitag, Nathan, Korampally, VenumadhavVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa7597
Date:
July, 2017
File:
PDF, 2.42 MB
english, 2017