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[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method
Tarala, Vitaly, Altakhov, Aleksandr, Ambartsumov, Mikhail, Martens, Vladimir, Shevchenko, MikhailYear:
2016
Language:
english
DOI:
10.1109/BALD.2016.7886528
File:
PDF, 229 KB
english, 2016