Fine Structure of O - Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism
Toyoda, Hirotaka, Goto, Kazuya, Ishijima, Tatsuo, Morita, Tadashi, Ohshima, Norikazu, Kinoshita, KeizoVolume:
2
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.2.126001
Date:
November, 2009
File:
PDF, 269 KB
english, 2009