External control of electron energy distributions in a dual...

Journal of Applied Physics 2015 / 08 Vol. 118; Iss. 8

External control of electron energy distributions in a dual tandem inductively coupled plasma

Liu, Lei, Sridhar, Shyam, Zhu, Weiye, Donnelly, Vincent M., Economou, Demetre J., Logue, Michael D., Kushner, Mark J.
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Volume:
118
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4928870
Date:
August, 2015
File:
PDF, 1.72 MB
english, 2015
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