Process Simulation of Pulsed Laser Annealing on Epitaxial...

ECS Journal of Solid State Science and Technology 2017 Vol. 6; Iss. 8

Process Simulation of Pulsed Laser Annealing on Epitaxial Ge on Si

Lu, Chun-Ti, Lu, Fang-Liang, Tsai, Chung-En, Huang, Wen-Hung, Liu, C. W.
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Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0051708jss
File:
PDF, 967 KB
english, 2017
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