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[IEEE 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) - Sendai, Japan (2016.8.22-2016.8.25)] 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) - Analysis of a Lloyd's mirror interferometer for fabrication of gratings
Ren, Zongwei, Aihara, Ryo, Shimizu, Yuki, Ito, So, Chen, Yuan-Liu, Gao, WeiYear:
2016
Language:
english
DOI:
10.1109/nano.2016.7751443
File:
PDF, 244 KB
english, 2016