[IEEE 2016 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2016.12.12-2016.12.13)] 2016 International Symposium on Semiconductor Manufacturing (ISSM) - A comprehensive “big-data-based” monitoring system for yield enhancement in semiconductor man ufacturing
Nakata, Kouta, Orihara, Ryohei, Mizuoka, Yoshiaki, Takagi, KentaroYear:
2016
Language:
english
DOI:
10.1109/ISSM.2016.7934510
File:
PDF, 4.52 MB
english, 2016