Defect growth in multilayer chromium nitride/niobium...

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Thin Solid Films 2017 / 6

Defect growth in multilayer chromium nitride/niobium nitride coatings produced by combined high power impulse magnetron sputtering and unbalance magnetron sputtering technique

Biswas, Barnali, Purandare, Yashodhan, Sugumaran, Arunprabhu A., Loch, Daniel A.L., Creasey, Stuart, Ehiasarian, Arutiun P., Hovsepian, Papken Eh., Khan, Imran
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.06.027
Date:
June, 2017
File:
PDF, 2.52 MB
english, 2017
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