MEMS flexible artificial basilar membrane fabricated from...

Journal of Micromechanics and Microengineering 2017 / 07 Vol. 27; Iss. 7

MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate

Jang, Jongmoon, Jang, Jeong Hun, Choi, Hongsoo
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Volume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa7236
Date:
July, 2017
File:
PDF, 2.11 MB
english, 2017
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