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[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Planarization of the porous surface of composition “nanoporous silicon dioxide - titanium dioxide” by atomic-molecular chemical assembly
Luchinin, Victor V., Panov, Mikhail F., Romanov, Alexandr A.Year:
2016
Language:
english
DOI:
10.1109/BALD.2016.7886522
File:
PDF, 753 KB
english, 2016