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[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Measuring the thickness of ALD-fabricated thin films by small-angle X-ray scattering
Nishchev, Konstantin N., Novopoltsev, Mikhail I., Ruzavina, Natalia A., Khramov, Vladimir S., Lyutova, Ekaterina N.Year:
2016
Language:
english
DOI:
10.1109/BALD.2016.7886524
File:
PDF, 268 KB
english, 2016