[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Evaluation of the quality of the dielectric spectroscopy data
Karpov, Andrey G., Klemeshev, Vladimir A.Year:
2016
Language:
english
DOI:
10.1109/BALD.2016.7886537
File:
PDF, 160 KB
english, 2016