An Electrical and Physical Study of Crystal Damage in...

Materials Science Forum 2017 / 5 Vol. 897

An Electrical and Physical Study of Crystal Damage in High-Dose Al- and N-Implanted 4H-SiC

Fisher, Craig A., Esteve, Romain, Doering, Stefan, Roesner, Michael, de Biasio, Martin, Kraft, Martin, Schustereder, Werner, Rupp, Roland
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Volume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.897.411
Date:
May, 2017
File:
PDF, 1.15 MB
english, 2017
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