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Mechanical model of nanoparticles for material removal in chemical mechanical polishing process
Hao Chen,Dan Guo,Guoxin Xie,Guoshun PanVolume:
4
Language:
english
Journal:
Friction
DOI:
10.1007/s40544-016-0112-z
Date:
June, 2016
File:
PDF, 1.77 MB
english, 2016