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AIP Conference Proceedings [AIP Publishing LLC INTERNATIONAL CONFERENCES AND EXHIBITION ON NANOTECHNOLOGIES AND ORGANIC ELECTRONICS (NANOTEXNOLOGY 2014): Proceedings of NN14 and ISFOE14 - Thessaloniki, Greece (12–12 June 2014)] - Design and fabrication of a MEMS chevron-type thermal actuator
Baracu, Angela, Voicu, Rodica, Müller, Raluca, Avram, Andrei, Pustan, Marius, Chiorean, Radu, Birleanu, Corina, Dudescu, CristianVolume:
1646
Year:
2015
Language:
english
DOI:
10.1063/1.4908578
File:
PDF, 1.21 MB
english, 2015