Plasma polymerized acetylene deposition using a return corona enhanced plasma reactor
ISLAM, Rokibul, XIE, Shuzheng, ENGLUND, Karl R, PEDROW, Patrick DVolume:
19
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/aa6bef
Date:
August, 2017
File:
PDF, 2.11 MB
english, 2017