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[IEEE IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society - Florence, Italy (2016.10.23-2016.10.26)] IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society - Trajectory tracking control for pneumatic actuated scan stage with time delay compensation
Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi, Hara, Atsushi, Saiki, KazuakiYear:
2016
Language:
english
DOI:
10.1109/IECON.2016.7793764
File:
PDF, 3.38 MB
english, 2016