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Structure and elemental composition of transparent nanocomposite silicon oxycarbonitride films
N. I. Fainer,A. G. Plekhanov,A. N. Golubenko…Volume:
58
Language:
english
Journal:
Journal of Structural Chemistry
DOI:
10.1134/S0022476617010188
Date:
January, 2017
File:
PDF, 567 KB
english, 2017