CVD-growth of CNT with the use of catalutic Ct–Me–N–O thin...

Russian Microelectronics 2017 / 3 Vol. 46; Iss. 2

CVD-growth of CNT with the use of catalutic Ct–Me–N–O thin films incorporated in the technology

D. G. Gromov,S. V. Bulyarskii,S. V. Dubkov,A. A. Pavlov…
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Volume:
46
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/S1063739717020032
Date:
March, 2017
File:
PDF, 2.00 MB
english, 2017
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