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Effect of the energy of bombarding electrons on the conductivity ofn-4H-SiC (CVD) epitaxial layers
V. V. Kozlovski,A. A. Lebedev,A. M. Strel’chuk,K. S. Davidovskaya…Volume:
51
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782617030137
Date:
March, 2017
File:
PDF, 262 KB
english, 2017