Alloyed Si/Al-based ohmic contacts to AlGaN/GaN nitride...

Semiconductors 2017 / 4 Vol. 51; Iss. 4

Alloyed Si/Al-based ohmic contacts to AlGaN/GaN nitride heterostructures

D. N. Slapovskiy,A. Yu. Pavlov,V. Yu. Pavlov,A. V. Klekovkin
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Volume:
51
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782617040194
Date:
April, 2017
File:
PDF, 740 KB
english, 2017
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